Research associate of the multilayer X-ray optics Department.
Personal data
Born on 05.09.1972, Nizhniy Novgorod.
Research interests
Layered absorption and polarizing filters for soft x-ray and extreme ultraviolet (ЭУФ) area, the projection ЭУФ lithograph
Education
1989 - 1995. - Advanced School of General and Applied Physics of N. I. Lobachevsky State University of Nizhniy Novgorod.
Career
1995 - 2009. - trainee researcher, junior research associate, research associate of the IPM RAS.
Publications
Application of free-standing multilayer films as polarizers for X-ray radiation / Andreev S. S., Bibishkin M. S., Chkhalo N. I., Lopatin A. Ya., Luchin V. I. Pestov, A. E., K. A. Prokhorov, N. Salashchenko n, Nuclear Instruments and Methods in Physics Research A543, 340 (2005).
Multilayer Zr/Si filters for EUV lithography and for radiation source readouts / Bibishkin M. S., Chkhalo N. I., S. A. Gusev, Kluenkov E. b., Lopatin A. Ya., Luchin V. I. Pestov, A. E., Salashchenko N. N., Shmaenok L. A., Tsybin N. N., Zuev S. Y., Proc. SPIE 7025, 702502 (2008).
Contact detail
Phone: +7 (831) 417-94-76 +123