Research associate of the multilayer X-ray optics Department, PhD in Physics.
Personal data
Born on 26.04.1980, Nizhniy Novgorod, Married candidate of Phys.-math. Sciences
Research interests
Multilayer x-ray optics, lithography extreme ultraviolet range, ion etching.
Education
- 1986 - 1990 - School #35
- 1990 - 1995 - School #29
- 1995 - 1997 - School-liceum #40
- 1997 - 2003 - Faculty of radiophysics of N. I. Lobachevsky State University of Nizhniy Novgorod;
- 1999 - 2004 - Faculty of Economics of;
- 2006 - PhD dissertation «the Development of diagnostic methods for problems of the projection lithography 13.5 nm», scientific supervisor - the member-correspondent. RAS, D. f.-M. Mr.. Mr.. Mr.. Салащенко, K. f.-M. Mr.. Mr.. And. Чхал;
Career
- 2000 - 2003 - senior assistant researcher of the Institute for Physics of Microstructures RAS;
- 2003 - 2006 - postgraduate student of the Institute for Physics of Microstructures RAS;
- 2003 - 2007 - junior research associate of the Institute for Physics of Microstructures RAS;
- 2007 - present - research associate of the Institute for Physics of Microstructures RAS;
Educational work
- 2007 - n/BP - holding educational-scientific experiment «Multilayer x-ray optics of soft range» for students of the 3rd course of the basic chair «Physics of nanostructures and nanoelectronics».
- 2009 - Храмков Roman Aleksandrovich. Bachelor's thesis (4 course) «Application of the method ion-beam etching for the correction of the form of optical surfaces with субнанометровой accuracy»
Publications
- Bibishkin, M. S. Laboratory methods for investigations of multilayer mirrors in the Extreme Ultraviolet and Soft X-Ray region / M. S. Bibishkin, D. P. Chehonadskih, N. I. Chkhalo, E. B. Kluyenkov, A. E. Pestov, N. N. Salashchenko, L. A. Shmaenok, I. G. Zabrodin, S. Yu. Zuev // Proceedings SPIE. - 2004. - v. 5401. - p.8-15.
- Andreev, S. S. Application of free-standing multilayer films as polarizers for X-ray radiation / S. S. Andreev, M. S. Bibishkin, N. I. Chkhalo, A. Ya. Lopatin, V. I. Luchin, A. E. Pestov, K. A. Prokhorov, N. N. Salashchenko // Nuclear Instruments and Methods in Physics Research A. - 2005. - v. 543. - p.340-345.
- Bibishkin, M. S. Ultra-short the period X-ray mirrors: Production and investigation / M. S. Bibishkin, N. I. Chkhalo, A. A. Fraerman, A. E. Pestov, K. A. Prokhorov, N. N. Salashchenko, Yu. A.? / / Nuclear Instruments and Methods in Physics Research A. - 2005. - v. 543. - p.333-339.
Contact detail
Phone: +7 (831) 417-94-76 +105